SIMNRA icon

SIMNRA

Computer simulation of RBS, ERDA, NRA and MEIS

by Matej Mayer

Max-Planck-Institut für Plasmaphysik

SIMNRA

Computer simulation of RBS, ERDA, NRA and MEIS

by Matej Mayer

SIMNRA VERSION 7.0

SIMNRA 7.0 offers the following improvements, compared to version 6.0:

Energy distributions of 19.68 MeV protons after traversing 0.2675 g/cm2 and 0.497 g/cm2 aluminum. Experimental data and simulations with SIMNRA 6 and SIMNRA 7.
Fig. 1: Energy distributions of 19.68 MeV protons after traversing 0.2675 g/cm2 and 0.497 g/cm2 aluminum. Dots: Experimental data from [C. Tschalär and H.D. Maccabee, Phys. Rev. B1 (1970) 2863]; Solid line: SIMNRA 7 calculation using a two-piece normal distribution for electronic energy-loss straggling; Dashed line: SIMNRA 6 calculation using a Gaussian energy distribution. From [Mayer10].
Backscattering of 2000 keV protons from graphite at a scattering angle of 165°. Experimental data and simulations with SIMNRA 6 and SIMNRA 7.
Fig. 2: Backscattering of 2000 keV protons from graphite at a scattering angle of 165°. Dots: Experimental data; Solid line: Simulation with SIMNRA 7 using improved treatment of resonant cross-sections; Dashed line: Simulation using SIMNRA 6. The SigmaCalc cross-section was used for both simulations. From [Mayer14].
Focused ion beam cross-section through a silicon grating on top of a tantalum interlayer on top of silicon substrate. Schematic representation of the measurement geometry parallel to the silicon grating structure. Backscattering of 1500 keV 4He ions from a silicon grating on top of a tantalum interlayer. Measurement parallel to the grating structure. Experimental spectrum and simulation with SIMNRA 7.
Fig. 3: Backscattering of 1500 keV 4He ions from a silicon grating on top of a tantalum interlayer on top of silicon substrate. Top: Focused ion beam cross-section through the sample structure. Middle: Schematic representation of the measurement geometry parallel to the silicon grating structure, scattering angle 165°. Bottom: Experimental spectrum (black dots) and simulation (red line) with SIMNRA 7. From [Langhuth11], [Mayer16a].
Scanning electron micrograph of a porous V2O5 layer. Backscattering spectra of 1500 keV 4He from a porous V2O5 layer at a scattering angle of 165°. Experimental data and computer simulations with SIMNRA 7.
Fig. 4: Top: Scanning electron micrograph of a porous V2O5 layer. Bottom: Backscattering spectrum of the porous V2O5 layer on silicon substrate using 1500 keV 4He ions at a scattering angle of 165°. Dots: Experimental data; Solid line: Computer simulation with SIMNRA 7 assuming a porous layer with 40% pore fraction and a pore diameter of 31 nm; Dashed line: Computer simulation assuming a dense layer. From [Mayer14].
Windows explorer view of extra-large thumbnails of SIMNRA data files and infotip.
Fig. 5: Windows Explorer view with extra-large thumbnails of SIMNRA data files. Additional information about the file content is displayed in the details pane at the bottom or as infotip.
Windows explorer view of file details of SIMNRA data files and search.
Fig. 6: Windows Explorer view with file details of SIMNRA data files. Only data files with incident energy larger than 1000 keV are displayed, see the Search field in the upper right corner.

A full list of changes from version 6.0 to version 7.0 can be found in the file CHANGES 7.0.TXT.

Download SIMNRA 7.0.