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SIMNRA

Computer simulation of RBS, ERDA, NRA and MEIS

by Matej Mayer

Max-Planck-Institut für Plasmaphysik

SIMNRA

Computer simulation of RBS, ERDA, NRA and MEIS

by Matej Mayer

RESOLNRA 1.8

RESOLNRA graphical user interface showing the depth resolution for carbon in tungsten.
Fig. 1: RESOLNRA graphical user interface, showing the depth resolution for a thin layer of carbon implanted into a depth of 5x1017 at/cm2 into tungsten. The 12C(3He,p0,1)14N reactions are used for the detection of 12C.

The program RESOLNRA performs depth resolution calculations. RESOLNRA allows to find the optimum experimental conditions for ion beam analysis methods, thus enabling optimized measurements. It is also indispensable for the design of new experimental set-up’s.

RESOLNRA calculates the depth resolution for all isotopes in the sample as function of

See [Mayer08] for details.

An example is shown in Fig. 1:  It shows the depth resolution for a thin layer of carbon implanted into tungsten. The upper left window shows the depth resolution as a function of depth. The lower left window shows the depth resolution in a depth of 5x1017 at/cm2 as a function of incident angle. The depth resolution in a depth of 5x1017 at/cm2 as function of incident energy and incident angle is shown in the upper right window as contour graph.

RESOLNRA is freely available. RESOLNRA 1.8 requires SIMNRA 7.0 or higher and can be downloaded together with SIMNRA.