The program RESOLNRA performs depth resolution calculations. RESOLNRA allows to find the optimum experimental conditions for ion beam analysis methods, thus enabling optimized measurements. It is also indispensable for the design of new experimental set-up’s.
RESOLNRA calculates the depth resolution for all isotopes in the sample as function of
- depth for a specific incident energy and a specific incident angle,
- incident energy for a specific depth and specific incident angle,
- incident angle for a specific depth and specific incident energy,
- incident energy and incident angle for a specific depth.
See [Mayer08] for details.
An example is shown in Fig. 1: It shows the depth resolution for a thin layer of carbon implanted into tungsten. The upper left window shows the depth resolution as a function of depth. The lower left window shows the depth resolution in a depth of 5x1017 at/cm2 as a function of incident angle. The depth resolution in a depth of 5x1017 at/cm2 as function of incident energy and incident angle is shown in the upper right window as contour graph.
RESOLNRA is freely available. RESOLNRA 1.8 requires SIMNRA 7.0 or higher and can be downloaded together with SIMNRA.